High speed quasi-monolithic silicon/piezostack SPM scanning stage

Graphical abstractDisplay Omitted Highlights? Fast SPM. ? High speed quasi-monolithic silicon/piezostack SPM scanning stage. ? High frequency self-actuated, self-sensing SPM-Cantilever. ? High performance miniaturized SPM system. ? Piezoresistive read-out technique. ? Bimetal thermally actuated cantilever. In this study we have developed a scanning stage mechanism based on quasi-monolithic integration of x-y piezoelectric actuation system together with a silicon MEMS unit. This novel scanner design is based on compact piezoelectric stacks, allowing the construction of a scanner with a 10µm-scanning range at high frequencies (>5kHz). A displacement of a sample holder has been measured through implanted piezoresistive sensors within the flexures of the silicon stage. The experimental setup is based on a high-frequency self-actuated cantilever. A self-actuated and self-sensing cantilever has been designed, modeled, fabricated, and characterized, and key features of simplicity in terms of installation and operation have been achieved.