Atmospheric and low pressure metalorganic vapor phase epitaxial growth of vertical quantum wells and quantum well wires on submicron gratings

Nonplanar metalorganic vapor phase epitaxial growth on submicron gratings has been studied. Growth conditions have been determined to preserve the grating structure and also to enhance the formation of crescent shaped quantum well wire-like GaAs layers. These growth parameters have been used to grow the layer structure of a quantum well wire (QWW) laser, only needing one growth run. Although there is not yet clear evidence for two-dimensional quantum confinement, this technique offers some interesting perspectives for the realization of QWW lasers.