Composition Analysis by Scanned Femtosecond Laser Ultraprobing (CASFLU/DOCMT)

Muriel Y. Ishikawa,J P Armstrong,B C Stuart,L L Wood,A E Wynne

Composition Analysis by Scanned Femtosecond Laser Ultraprobing (CASFLU/DOCMT)

2001

Muriel Y. Ishikawa
J P Armstrong
B C Stuart
L L Wood
A E Wynne

A new technology for ultrahigh-spatial resolution mapping of the isotopic, molecular, and chemical compositions of complex, multi-dimensional objects, in semiconductor, archaeological, paleontological, biological and materials R&D.

Keywords:

Chemical composition
Laser
Femtosecond
Semiconductor
Analytical chemistry
Materials science
Image resolution
composition analysis
Optoelectronics
Optics

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