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CMOS Compatible Micro-machined Gas Sensing Array
CMOS Compatible Micro-machined Gas Sensing Array
2000
Yaowu Mo
Yuzo Okawa
Motoshi Tajima
Takehito Nakai
Nobuyuki Yoshiike
Kazuki Natukawa
Keywords:
Electronic engineering
Materials science
CMOS
Optoelectronics
cmos compatible
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