Storage, transporting system and storage set

2008 
A storage accepts FOUP of a plurality of baseplates for manufacturing semiconductor components, e.g. the storage of a stocker for temporarily keeping goods of FOUP and the like, for performing in and out of the storage on the goods effectively in a simple structure, or effectively performing transportation in the storage. The storage (10) comprises a supporting part (11) capable of supporting the goods (3); a horizontal driving part (13) capable of moving the supporting part back and forth in a horizontal direction; a vertical driving portion (14) capable of moving the supporting part back and forth in a vertical direction; and a plurality of racks (15) with putting surfaces, during a plurality of phases causing the supporting part to reach the vertical direction through the vertical driving, one or more than two rack(s) is/are arranged on the horizontal reached through the horizontal driving part, to respectively transport the goods between the racks and the supporting part. At least one of the putting surfaces functions as a port for unloading and loading the goods.
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