Magnetron assembly and method for operating a Rohrmagnetronanordnung

According to various embodiments, a magnetron (100) may comprise: a tubular cathode (102k) extending in the axial direction (101); a cathode within the tubular (102k) disposed magnet assembly (102m) which elongate in the axial direction a (101) plasma generation region (106) defined below the tubular cathode (102k); a first anode structure (108) which extends in the axial direction (101) and laterally next to the longitudinally extended plasma formation region (106) and / or to the side of the tubular cathode (102k) is arranged; and a second anode structure (110) which is arranged in the axial direction (101) at a distance from the elongate plasma-forming region (106).