Mems device, packaging device and method mems

The present invention discloses a MEMS device, the MEMS device package and a manufacturing method. In one embodiment, a microelectromechanical system (MEMS) device comprising a first structure and the second MEMS functional MEMS functional configuration. MEMS pressure inside area of ​​the second functional configuration of the internal pressure of the MEMS functional configuration different from the first.