Mems device, packaging device and method mems
2012
The present invention discloses a MEMS device, the MEMS device package and a manufacturing method. In one embodiment, a microelectromechanical system (MEMS) device comprising a first structure and the second MEMS functional MEMS functional configuration. MEMS pressure inside area of the second functional configuration of the internal pressure of the MEMS functional configuration different from the first.
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI