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Layer-by-layer etching of LaAlSiO x
Layer-by-layer etching of LaAlSiO x
2017
Mitsuhiro Omura
Kazuhito Furumoto
Kazuhisa Matsuda
Toshiyuki Sasaki
Itsuko Sakai
Hisataka Hayashi
Keywords:
Dry etching
Analytical chemistry
Etching
Chemistry
Isotropic etching
Layer by layer
Reactive-ion etching
Etching (microfabrication)
Optoelectronics
Correction
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