Microlithographic Pattern Generation for Optics

For the fabrication of optical and microoptical elements like gratings, lenses, waveguides, zoneplates, computer-generated holograms, and so on, many different fabrication technologies are available. Some of these elements are planar elements; that is, the optical function of such elements is realized by a thin planar layer containing special structures and/or materials. For the fabrication of such elements, lithographic technologies are employed very often.