Mechanical properties of TiN films prepared in glow-arc transition region

Hongri Liu,Bailing Jiang,Hongtao Li

Mechanical properties of TiN films prepared in glow-arc transition region

2020

Hongri Liu
Bailing Jiang
Hongtao Li

Titanium nitride (TiN) films were generated in the abnormal glow discharge (AGD) region and the glow-arc transition discharge (GATD) region by varying target current density (Ja) in an Ar/N2 atmosp...

Keywords:

Materials science
Titanium nitride
Arc (geometry)
Tin
Sputter deposition
Glow discharge
Metallurgy
Composite material
Current density

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