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A projection type electron beam apparatus for inspecting a specimen by using electrons emitted from the sample
A projection type electron beam apparatus for inspecting a specimen by using electrons emitted from the sample
2004
tooru satake
yuuitirou yamazaki
hou takasi hirabayasi
takesi murakami
kenzi watanabe
masanori hatakeyama
sinzi nozi
itirouta nagahama
Keywords:
Cathode ray
Optics
Electron
Materials science
Correction
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