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Analysis of Bonding-Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer Bonding.
Analysis of Bonding-Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer Bonding.
1997
S Mack
H Baumann
U. Goesele
H. Werner
R. Schloegl
Keywords:
Optoelectronics
Enclosure
Wafer
Inorganic chemistry
Chemistry
Correction
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