Development of Pressure Sensor for Oil and Gas Field Based on Sputtered Thin Film

Gas well head pressure sensors are the important front-end equipments of digitalizatio n construction of Changqing oil field. Foreign pressure sensors are once relied on for a long time there. A problem urgent to be solved of digitalizatio n construction is to develope pressure sensors with independent intellectual property and with integrated advantages of high precision, high stability, high reliability and wide temperature range. This paper introduced the development of a kind of pressure sensor based on technology of sputtered thin film and method of micro-machini ng. Design and manufacture of the pressure-sensitive element are introduced, which are comprised of elastic body, insulating film, wire grid etc. Meanwhile, tests and experiments are developed. The pressure sensors this paper developed possess the merits of high precision, high stability, and could meet the long term pressure testing requirements of oil and gas field.