Software and Interfaces for the Automatic Operation of a Quadrupole SIMS Instrument

Software and interfaces developed for the automation of the EVA 2000 [1] and EVA 3000 quadrupole SIMS instruments designed and built by the authors’ research group are described. The software runs on a 380Z micro-computer (Research Machines, Ltd.). It contains a number of unique features, including automatic parameter change (mass, target potential, or raster) on detection of a threshhold ion intensity, and the ability to acquire diagnostic energy and mass spectra from any plane in a depth profile. There are four sequential experimental controllers (SEC’s) written in Basic: DEPRO, ESP, MASCAN, and MASTEP. These enable automatic running of multi-channel depth profiles [1], energy spectra [2], mass spectra (line or peak), and static SIMS experiments [3] respectively. Programmes run under an Interpreter (BASIMS) which has been modified to include about 40 machine code subroutines (MCS) for SIMS purposes. These may be called from the keyboard for immediate control, or from the SEC’s. SEC’s for special experiments can be written by anyone with a knowledge of Basic, yet retain the full flexibility of the instrument by CALLing the appropriate MCS. The SEC’s enable new personnel to become familiar both with the operation of the instrument, and with sequences for the main SIMS tasks. Instrumental parameters are stored on disc for automatic setting up.