Solar-blind ultraviolet AlInN/AlGaN distributed Bragg reflectors

A 13.5-pair Al0.98In0.02N/Al0.77Ga0.23N distributed Bragg reflector (DBR) was grown by molecular beam epitaxy on an AlN template substrate. The DBR exhibited a peak reflectivity of 83.9% at 246 nm within the deep solar-blind ultraviolet region and a stopband width of 18 nm. The average refractive index contrast for the DBR was 9.25% at 246 nm, which is relatively high compared with that of a traditional Al(Ga)N/(Al)GaN DBR. Simulated results indicated that a 25.5-pair Al0.98In0.02N/Al0.77Ga0.23N DBR will provide a reflectivity higher than 99% and a 19 nm wide stopband with a center wavelength of 246 nm.