Control-oriented modelling of an experimental Ar-O 2 plasma process

Development of a control-oriented model of an experimental plasma reactor is presented in this paper. The model structure is suitably partitioned in order to facilitate any subsequent control design. In the model, the linear dynamical part is conveniently separated from a static nonlinearity, which in turn allows identification to be performed for both parts independently. Validation results indicate that the model gives a reasonable representation of the studied plasma process.