Ultra-low-loss high-aspect-ratio Si3N4 wavequides - eScholarship

Ultra-low-loss high-aspect-ratio Si 3 N 4 waveguides Jared F. Bauters, 1,* Martijn J. R. Heck, 1 Demis John, 1 Daoxin Dai, 1 Ming-Chun Tien, 1 Jonathon S. Barton, 1 Arne Leinse, 2 Rene G. Heideman, 2 Daniel J. Blumenthal, 1 and John E. Bowers 1 Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106, USA LioniX BV, P.O. Box 456, 7500 AH, Enschede, Netherlands *jbauters@ece.ucsb.edu Abstract: We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si 3 N 4 deposited with low- pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach. ©2011 Optical Society of America OCIS codes: (130.0130) Integrated optics; (230.7390) Waveguides, planar. References and links H. Takahashi, “Planar lightwave circuit devices for optical communication: present and future,” Proc. SPIE C. Ciminelli, F. Dell’Olio, C. E. Campanella, and M. N. Armenise, “Photonic technologies for angular velocity sensing,” Adv. Opt Photon. 2(3), 370–404 (2010). E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, and J. E. Bowers, “Photonic integrated circuit optical buffer for packet-switched networks,” Opt. Express 17(8), 6629–6635 K. Horikawa, I. Ogawa, T. Kitoh, and H. Ogawa, “Silica-based integrated planar lightwave true-time-delay network for microwave antenna applications,” in Proceedings of the Optical Fiber Communication Conference, (San Jose, Calif., 1996), Vol. 2, pp. 100–101. Y. Li, and C. Henry, “Silica-based optical integrated circuits,” IEE Proc., Optoelectron. 143(5), 263 (1996). B. Larsen, L. Nielsen, K. Zenth, L. Leick, C. Laurent-Lund, L. Andersen, and K. Mattsson, “A Low-Loss, Silicon-Oxynitride Process for Compact Optical Devices,” in Proceedings of ECOC (Rimini, Italy, 2003). R. Adar, M. Serbin, and V. Mizrahi, “Less than 1 dB per meter propagation loss of silica waveguides measured using a ring resonator,” J. Lightwave Technol. 12(8), 1369–1372 (1994). T. Kominato, Y. Hida, M. Itoh, H. Takahashi, S. Sohma, T. Kitoh, and Y. Hibino, “Extremely low-loss (0.3 dB/m) and long silica-based waveguides with large width and clothoid curve connection,” in Proceedings of ECOC (Stockholm, Sweden, 2004). F. Morichetti, A. Melloni, M. Martinelli, R. G. Heideman, A. Leinse, D. H. Geuzebroek, and A. Borreman, “Box-Shaped Dielectric Waveguides: A New Concept in Integrated Optics?” J. Lightwave Technol. 25(9), 2579– F. P. Payne, and J. P. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum. Electron. 26(10), 977–986 (1994). A. Melloni, F. Morichetti, R. Costa, G. Cusmai, R. Heideman, R. Mateman, D. Geuzebroek, and A. Borreman, “TriPleX TM : a new concept in optical waveguiding,” in Proceedings of the 13th European Conference on Integrated Optics (Copenhagen, Denmark, 2007), pp. 3–6. D. Dai, J. F. Bauters, M. Tien, M. Heck, D. Blumenthal, and J. E. Bowers, “Polarization characteristics of low- loss nano-core buried optical waveguides and directional couplers,” in Proceedings of GFP (Beijing, China, F. Ay, and A. Aydinli, “Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides,” Opt. Mater. 26(1), 33–46 (2004). S. Sakaguchi, S. Todoroki, and S. Shibata, “Rayleigh scattering in silica glasses,” J. Am. Ceram. Soc. 79(11), T. Barwicz, and H. Haus, “Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides,” J. Lightwave Technol. 23(9), 2719–2732 (2005). #136596 - $15.00 USD Received 13 Oct 2010; revised 9 Dec 2010; accepted 13 Dec 2010; published 3 Feb 2011 (C) 2011 OSA 14 February 2011 / Vol. 19, No. 4 / OPTICS EXPRESS 3163