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Growth of InGaAs-channel transistor layers on large-scale Si wafers for HeteroIntegration with Si CMOS
Growth of InGaAs-channel transistor layers on large-scale Si wafers for HeteroIntegration with Si CMOS
2017
Xuan Sang Nguyen
Sachin Yadav
Kwang Hong Lee
David Kohen
Annie Kumar
Riko I. Made
Xiao Gong
Kun-Ho Lee
Chuan Seng Tan
S.F. Yoon
S. J. Chua
Eugene A. Fitzgerald
Keywords:
Wafer
CMOS
Transistor
Electronic engineering
Communication channel
Materials science
Optoelectronics
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