Integrally molded fiber microsensor and manufacturing method thereof

2010 
The invention relates to an integrally molded fiber microsensor and a manufacturing method and belongs to the technical field of microsensors. In the invention, a groove with a certain width is formed on the lateral surface of a certain part with a coating removed of a fiber by using femtosecond laser pulse technology, the depth of the groove is a little smaller than the distance from the lateral surface to a fiber core so as to guarantee the integrity of the fiber core, and the bottom surface of the groove is an ablation interface lamina with refractivity increasing uniformly; and a scavenging method is adopted in the whole process to remove ablation chips to guarantee the processing effect. The microsensor in the invention has no assembled or movable parts, has the advantages of integral molding, simple structure, high mechanical strength, high coupling effect and the like and overcomes the shortcomings of instability and the like caused by manufacturing and assembling the plane waveguide fiber microsensor separately. The sensor can detect the existence and concentration of specific molecules in the environment and can also be used for detecting temperature or pressure change.
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