Amorphous silicon/microcrystalline silicon laminated solar cell and preparation method thereof

The invention provides an amorphous silicon/microcrystalline silicon laminated solar cell, comprising a glass substrate, a transparent conductive film, a P1-I1-N1 amorphous silicon cell, a P2-I2-N2 microcrystalline silicon cell, an n-type layer in which an amorphous silicon/microcrystalline silicon transitional region is close to an amorphous silicon region, a ZnO (Zinc Oxide) layer, an Al (Aluminum) layer, an EVA (Ethylene-vinyl Acetate Copolymer) layer and back plate glass, wherein the glass substrate, the transparent conductive film, the P1-I1-N1 amorphous silicon cell, the P2-I2-N2 microcrystalline silicon cell, the n-type layer, the ZnO layer, the Al layer, the EVA layer and the back plate glass form a laminated structure in sequence; the P1-I1-N1 amorphous silicon cell is used as a top cell; the P2-I2-N2 microcrystalline silicon cell is used as a bottom cell; and the ZnO and the Al are used as a composite back electrode. The amorphous silicon/microcrystalline silicon laminated solar cell provided by the invention has the following advantages that: because an nth layer of the amorphous silicon top cell stored in the atmosphere is treated by using H or Ar plasma before the microcrystalline silicon bottom cell is prepared, an SiOx layer generated due to the reaction between the surface of the nth layer and oxygen in the atmosphere can be eliminated; and the amorphous silicon/microcrystalline silicon laminated solar cell provided by the invention has the advantages of simple preparation process, easiness for control, high excellence rate of products, high cell conversion efficiency and low updating and upgrading cost of the product, can be conveniently transplanted to a traditional silicon-based film cell production line and is beneficial for popularization.