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On the direct bonding of two silicon surfaces
On the direct bonding of two silicon surfaces
2012
Natacha Cocheteau
Frédéric Lebon
Iulian Rosu
Sonia Ait Zaid
Hélène Combes
Arnaud Etcheberry
Eric Prieto
Yves Salaun
Isabelle Savin de Larclause
Keywords:
Anodic bonding
Direct bonding
Materials science
Inorganic chemistry
Silicon
Composite material
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