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Study of Adsorption of H on Stepped SiC Surface during CVD using HCl
Study of Adsorption of H on Stepped SiC Surface during CVD using HCl
2021
Tomoya Kimura
Kenta Chokawa
Atsushi Oshiyama
Kenji Shiraishi
Keywords:
Materials science
Chemical vapor deposition
Adsorption
surface
Chemical engineering
Silicon carbide
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