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The effect of oxidation and reduction annealing on Vfb shift in ITO/HfO2 MOS capacitors
The effect of oxidation and reduction annealing on Vfb shift in ITO/HfO2 MOS capacitors
2011
Nabatame Toshihide
Yamada Hiroyuki
Ohi Akihiko
Ohishi Tomoji
Chikyow Toyohiro
Keywords:
Redox
Capacitor
Annealing (metallurgy)
Materials science
Inorganic chemistry
oxygen diffusion coefficient
Chemical engineering
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