Integrating Micro Array Probes with Amplifier on Flexible Substrate

In this paper a bio-sensing module by integrating a micro-array probes device and a semiconductor amplifier respectively on two flexible substrates is proposed, which utilizes semiconductor processes. The amplifier is formed of bottom-gate thin film transistors (TFT). As such, the signal obtained by the bio-sensing probes can be amplified nearby to improve the signal-to-noise ratio and impedance matching. This module is formed on the flexible substrate such that the bio-probe device can be disposed to conform to the profile of a living body’s portion to improve the electrical contact property.