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Numerical investigation of growth mechanisms of clusters in a silane capacitively coupled radio frequency discharge
Numerical investigation of growth mechanisms of clusters in a silane capacitively coupled radio frequency discharge
2003
Kathleen De Bleecker
Annemie Bogaerts
W. J. Goedheer
Renaat Gijbels
Keywords:
Molecular physics
Silane
Radio frequency
Cluster (physics)
Materials science
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