Advanced studies of medium-mass ion sources-1: Effect of beam neutralization on beam micro-divergence angle

Koichi Kasuya,Seimei Araya,Takahiro Kamiya

Advanced studies of medium-mass ion sources-1: Effect of beam neutralization on beam micro-divergence angle

2002

Koichi Kasuya
Seimei Araya
Takahiro Kamiya

Effect of beam neutralization on the beam micro-divergence angle was investigated for proton beam with hydrogen gas puff. About 10% reduction of the angle was observed preliminary.

Keywords:

Atomic physics
Ion gun
Ion beam
Beam (structure)
Focused ion beam
Charged particle
Charged particle beam
Ion
Ion beam deposition
Chemistry
Proton
Materials science

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