Hot wall chemical vapor deposition model
1995
Keywords:
- Hybrid physical-chemical vapor deposition
- Chemical vapor deposition
- Plasma processing
- Combustion chemical vapor deposition
- Electron beam physical vapor deposition
- Pulsed laser deposition
- Analytical chemistry
- Plasma-enhanced chemical vapor deposition
- Deposition (phase transition)
- Chemistry
- Chemical engineering
- Materials science
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
10
References
0
Citations
NaN
KQI