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Non-equilibrium electron energy distribution in oxygen plasma: observation with optical emission spectroscopy
Non-equilibrium electron energy distribution in oxygen plasma: observation with optical emission spectroscopy
2017
John B. Boffard
Nathaniel Ly
Shicong Wang
Colin Swee
Chun C. Lin
Amy E. Wendt
Keywords:
Oxygen
Radiochemistry
Plasma
Electron
Emission spectrum
Chemistry
oxygen plasma
Materials science
optical emission spectroscopy
Atomic physics
electron energy
Correction
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