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On the silicon nitride film formation from N2-SiH4 electron cyclotron resonance plasma
On the silicon nitride film formation from N2-SiH4 electron cyclotron resonance plasma
1992
Young-Jin Kim
Jin-hyung Kim
Alexander Song
Howard Y. Chang
Keywords:
Thin film
Silicon nitride
Plasma
X-ray photoelectron spectroscopy
Electron cyclotron resonance
Analytical chemistry
Wafer
Nuclear magnetic resonance
Materials science
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