Line shape measurements of atoms sputtered from polycrystalline Cu, Zn, and Al by 300 keV Ar+ bombardment

Abstract The line shape of atomic transitions of excited Cu, Zn, and Al atoms sputtered from polycristalline metal and from surface-coated Zn and Al by the bombardment with 300 keV Ar + ions has been measured. The influence of radiationless de-excitation processes on the line shape has been studied. The experimental results are compared with a single collision model introduced by van der Weg and Bierman 7 ) for Ar + bombardment of Cu.