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Application of high-K dielectric material thin film to DRAM capacitors-Issues and a direction.
Application of high-K dielectric material thin film to DRAM capacitors-Issues and a direction.
1997
Yuzuru Ohji
Shinpei Iijima
Naruhiko Nakanishi
Isamu Asano
Keywords:
Capacitor
High-κ dielectric
Thin film
Electronic engineering
Dynamic random-access memory
Computer hardware
Memory cell
Dram
Materials science
Optoelectronics
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