Modular approach for simulation-based optimization of MEMS

The importance of MEMS optimization concerning performance, power consumption, and reliability increases. In the MEMS design flow a variety of specialized tools is available. For simulation on component level FEM tools are widely used. Simulations on system level are carried out with simplified models using simulators like Saber, ELDO or Spice. A few simulators offer tool-specific optimization capabilities but there is a lack of simulator independent support of MEMS optimization. Our approach aims at a flexible combination of simulators and optimization algorithms by partitioning the optimization cycle. This new method is translated into a modular optimization system implemented in JAVA. The paper covers the partitioning of optimization cycle, the interaction between the modules of the optimization system, first experiences in web-based optimization, and the application of the approach to MEMS optimization.