Etching chamber having automatic cleaning function, and cleaning assembly and cleaning method thereof

The invention provides an etching chamber having an automatic cleaning function, and a cleaning assembly and a cleaning method thereof. The cleaning assembly is composed of a first spraying mechanism and a second spraying mechanism; the first spraying mechanism is used for spraying an etching solution; and the second spraying mechanism arranged above the first spraying mechanism is used for spraying a cleaning solution when the first spraying mechanism stops spraying the etching solution, thereby cleaning the first spraying mechanism. Therefore, the inside of the etching chamber can be cleaned at any time, so that crystals caused by etching solution volatilization can be reduced and thus any damage caused by the crystals can be reduced.