The effects of gaseous impurities on excimer laser operation

This paper evaluates the effects of a wide range of gaseous impurities introduced into the lasing gas mixture of a XeCl excimer laser, on laser performance. The experimental programme investigated the effects of impurities on both initial laser output and on laser gas lifetimes. A possible reaction mechanism for the internal consumption of N2 impurity has been identified in which the reaction products are benign. The effects of He additions to the Ne buffer gas are also evaluated.This paper evaluates the effects of a wide range of gaseous impurities introduced into the lasing gas mixture of a XeCl excimer laser, on laser performance. The experimental programme investigated the effects of impurities on both initial laser output and on laser gas lifetimes. A possible reaction mechanism for the internal consumption of N2 impurity has been identified in which the reaction products are benign. The effects of He additions to the Ne buffer gas are also evaluated.