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Characteristics of titanium dioxide films deposited by metalorganic chemical vapor deposition
Characteristics of titanium dioxide films deposited by metalorganic chemical vapor deposition
2002
Dong Wang
M. Wang
X. H. Xu
Yun Hou
H. Wang
H. Han
Keywords:
Materials science
Chemical vapor deposition
Hybrid physical-chemical vapor deposition
Metalorganic vapour phase epitaxy
Titanium dioxide
Titanium
Inorganic chemistry
Combustion chemical vapor deposition
Crystallinity
Polymer
Correction
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