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Perovskite BaHfO3 Dielectric Layers for Dynamic Random Access Memory Storage Capacitor Applications
Perovskite BaHfO3 Dielectric Layers for Dynamic Random Access Memory Storage Capacitor Applications
2009
Grzegorz Lupina
J. Dabrowski
P. Dudek
Grzegorz Kozlowski
M. Lukosius
Christian Wenger
Hans-Joachim Müssig
Keywords:
Dielectric
Perovskite (structure)
Thin film
Capacitor
Scanning electron microscope
Perovskite
Composite material
Electronic engineering
Dynamic random-access memory
Atomic force microscopy
Materials science
Optics
Optoelectronics
dielectric thin films
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