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Growth of Crystalline TiO 2 by Plasma Enhanced Chemical Vapor Deposition
Growth of Crystalline TiO 2 by Plasma Enhanced Chemical Vapor Deposition
2009
Ana Borras
Juan Ramon Sanchez-Valencia
Roland Widmer
Víctor J. Rico
A. Justo
Agustín R. González-Elipe
Keywords:
Hybrid physical-chemical vapor deposition
Plasma-enhanced chemical vapor deposition
Combustion chemical vapor deposition
Plasma processing
Pulsed laser deposition
Chemistry
Crystal
Inorganic chemistry
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