Broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm

A broadband Rh/C (50/50) multilayer coating was deposited on a blazed reflection grating replica sample. A calculation of possible materials and configurations showed that a 6-layer pair multilayer of rhodium/carbon or a 7 layer of nickel/carbon covered by 2 nm rhodium layer would give a factor of 6-10 increase in reflection efficiency depending on the roughness of the layer interfaces. Measurements with X-rays at wavelengths down to 0.4 nm on a Rh/C multilayer blazed grating combination showed a substantial increase in reflectivity with respect to a gold coated grating for a fixed angle of incidence of 1 deg.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.