Realization of temperature‐compensated GaAs surface acoustic wave delay lines

Compensation for the first‐order temperature coefficient of phase delay (TCD) of GaAs surface acoustic wave delay lines has been experimentally achieved using a two‐layer Au/SiO2 film coating. The negative TCD of SiO2 provides temperature compensation, while the mass loading effect of the gold layer provides nonleaky Rayleigh wave propagation.