METHOD AND photovoltaic device substrate manufacturing apparatus substrate for solar power generation device

A the method of manufacturing a photovoltaic device substrate to form a textured structure subjected to a surface treatment on the semiconductor substrate surface after cutting out the semiconductor substrate by slicing a semiconductor ingot, organic adhering to the surface of the semiconductor substrate a cleaning step of cleaning is removed by the cleaning liquid containing an oxidizing agent and impurities and metal impurities, is continuously performed after the washing step, by anisotropic etching with an alkaline aqueous solution the surface of said semiconductor substrate, by the slice It caused an etching step of forming the textured structure on the surface of the semiconductor substrate to remove the damaged layer of the substrate surface, including.