Application of HTS / Dielectric Multilayered Thin Films for Microwave Devices

A new concept of resonator with an electrode structure consisting of YBa2Cu3O7-δ (YBCO)/MgO multilayered films has been proposed [1]. Toward its realization of this concept, in the present study, epitaxial growth of YBCO / MgO / YBCO trilayered film on LaA1O3 (100) substrate is obtained and its properties are compared with bi- and mono-layered films. The monolayer YBCO films show a good transport and microwave properties and a crystalline quality. The quality of the crystal structure of the film tended to degrade with increasing the number of layer.