Compact J-band Oscillators With lm RF output Power and Over 110 GHz Modulation Bandwidth

We report a compact resonant tunneling diode (RTD) oscillator with 1 mW output power at 260 GHz and a modulation bandwidth of over 110 GHz. The oscillator employs an RTD device size of $4 \times 4 \ \mu \mathrm{m}^{2}$ resonating with an $88 \ \mu \mathrm{m}$ long microstrip inductor. The total chip size is $470 \ \times 530 \ \mu \mathrm{m}^{2}$ . All fabrication was done using the low cost photolithography technique.