Effect of design parameters on the rotational response of a novel disk resonator for liquid-phase sensing: Analytical results

The advantages of a novel “all-shear interaction device” (ASID), consisting of a disk driven and supported by two tangentially oriented microcantilevers, are explored through the derivation of a new analytical model for the in-plane rotational response of the disk due to harmonic axial eigenstrains (e.g., electrothermal strains) imposed on the supporting legs. The resulting expressions for frequency response, resonant frequency, and quality factor (Q) explicitly show their relationships to the device's geometric and material parameters and the density and viscosity of the liquid. The validity of the model is confirmed by FEA and recent experimental data from the literature, thus demonstrating the potential for both the device and the model for use in liquid-phase sensing applications.