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Metal-Nitride-Semiconductor Capacitors on 6H-SiC
Metal-Nitride-Semiconductor Capacitors on 6H-SiC
1998
S. Berberich
P. Godignon
José Millán
Dominique Planson
Hans L. Hartnagel
A. Senes
Keywords:
Capacitor
Metallurgy
Composite material
Poole–Frenkel effect
Nitride
Semiconductor
Materials science
Metal
Optoelectronics
nitride semiconductors
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