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Thermal characterization of SOI CMOS micro hot-plate gas sensors
Thermal characterization of SOI CMOS micro hot-plate gas sensors
2010
Haneef
Burzo
Ali
Komarov
Udrea
Raad
Keywords:
characterization
hot plate
Microelectromechanical systems
Thermal
Silicon
Silicon on insulator
Temperature measurement
Optoelectronics
CMOS
Materials science
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