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Measurement of radial density of Ar metastables in an inductively coupled plasma in Ar/O 2
Measurement of radial density of Ar metastables in an inductively coupled plasma in Ar/O 2
2007
Yuichiro Hayashi
Satoshi Hirao
Toshiaki Makabe
Keywords:
Inductively coupled plasma
radial density
Atomic physics
Materials science
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