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The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
1978
E. Bassous
E. F. Baran
Keywords:
Anisotropy
Dry etching
Analytical chemistry
Nozzle
Reactive-ion etching
Etching
Etching (microfabrication)
Silicon
Chemistry
Nanotechnology
Fabrication
anisotropic etching
Correction
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