Foup the gas replacement device

PROBLEM TO BE SOLVED: To provide a means in which gas replacement with an inert gas is executed by performing vacuum suction following after preventing the occurrence of a pressure difference by making a vacuum container communicate with the inside of an FOUP after putting the FOUP in the vacuum container, accordingly, an atmosphere in the FOUP is replaced by an inert gas with an inert gas consumption amount almost equal to a capacity of the vacuum container and with concentration almost equal to an inert gas supply source, and at the same time, handling of the FOUP whose gas is replaced can be automated. SOLUTION: An opening/closing mechanism 10 of a sealing plug 17 of an FOUP 1 purge port is mounted inside the vacuum container 6. A flange opening/closing mechanism is provided to a front flange 8 and a rear flange 9 of the vacuum container 6. COPYRIGHT: (C)2004,JPO