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Decomposition of AFM images of ultrasmooth optical surface polished with gas cluster ion beam
Decomposition of AFM images of ultrasmooth optical surface polished with gas cluster ion beam
2019
A.E. Ieshkin
Dmitriy S Kireev
V. S. Chernysh
Alexey Molchanov
Andrey E. Serebryakov
Mikhail V. Chirkin
Keywords:
Atomic force microscopy
Decomposition
Molecular physics
Gas cluster ion beam
Materials science
Surface finish
optical surface
Ring laser gyroscope
Optics
Correction
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