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Texture and Lattice Strain Determination of Molybdenum Thin Films Deposited by D.C. Magnetron Sputtering
Texture and Lattice Strain Determination of Molybdenum Thin Films Deposited by D.C. Magnetron Sputtering
1991
Patrice Gergaud
P. Bosland
J. J. Bacmann
Jean Lu Lebrun
Keywords:
Sputter deposition
Metallurgy
Molybdenum
Thin film
High-power impulse magnetron sputtering
Composite material
Strain (chemistry)
Materials science
lattice strain
Correction
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